TY - RPRT TI - Experimental Demonstration of Efficient and Polarization-Diversity Fiber-Chip Coupling by 2D Grating Couplers with 193-nm DUV Lithography AU - Wu Zhou AU - Kaihang Lu AU - Shijie Kang AU - Xiaoxiao Wu AU - Yeyu Tong PY - 2025 UR - https://arxiv.org/abs/2407.14432 ID - 2407.14432 ER -