@misc{indiciae2f044b67939c,
  title = {More-than-Moore Microacoustics: A Scalable Fabrication Process for Suspended Lamb Wave Resonators},
  author = {Marco Liffredo and Federico Peretti and Nan Xu and Silvan Stettler and Luis Guillermo Villanueva},
  year = {2024},
  url = {https://arxiv.org/abs/2407.15213},
  note = {Source identifier: 2407.15213}
}