TY  - RPRT
TI  - More-than-Moore Microacoustics: A Scalable Fabrication Process for Suspended Lamb Wave Resonators
AU  - Marco Liffredo
AU  - Federico Peretti
AU  - Nan Xu
AU  - Silvan Stettler
AU  - Luis Guillermo Villanueva
PY  - 2024
UR  - https://arxiv.org/abs/2407.15213
ID  - 2407.15213
ER  -