@misc{indiciaee5a3b20c060b,
  title = {Modeling Inverse Ellipsometry Problem via Flow Matching with a Large-Scale Dataset},
  author = {Yiming Ma and Jianzhi Teng and Xinjie Li and Xin Sun and Zhiyong Wang and Yuzhou Song and Lionel Z. Wang and Bin Chen},
  year = {2026},
  url = {https://arxiv.org/abs/2407.17869},
  note = {Source identifier: 2407.17869}
}