TY  - RPRT
TI  - Modeling Inverse Ellipsometry Problem via Flow Matching with a Large-Scale Dataset
AU  - Yiming Ma
AU  - Jianzhi Teng
AU  - Xinjie Li
AU  - Xin Sun
AU  - Zhiyong Wang
AU  - Yuzhou Song
AU  - Lionel Z. Wang
AU  - Bin Chen
PY  - 2026
UR  - https://arxiv.org/abs/2407.17869
ID  - 2407.17869
ER  -