@misc{indiciaea512466ee971,
  title = {Optimizing ToF-SIMS Depth Profiles of Semiconductor Heterostructures},
  author = {Jan Tröger and Reinhard Kersting and Birgit Hagenhoff and Dominique Bougeard and Nikolay V. Abrosimov and Jan Klos and Lars R. Schreiber and Hartmut Bracht},
  year = {2024},
  url = {https://arxiv.org/abs/2407.17985},
  note = {Source identifier: 2407.17985}
}