@misc{indiciaef0013e3fdff9, title = {Chip-scale sensor for spectroscopic metrology}, author = {Chunhui Yao and Wanlu Zhang and Peng Bao and Jie Ma and Wei Zhuo and Minjia Chen and Zhitian Shi and Jingwen Zhou and Yuxiao Ye and Liang Ming and Ting Yan and Richard Penty and Qixiang Cheng}, year = {2024}, url = {https://arxiv.org/abs/2407.18172}, note = {Source identifier: 2407.18172} }