@misc{indiciaedf5a5d053390,
  title = {Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator},
  author = {Amy Navarathna and Benjamin J. Carey and James S. Bennett and Soroush Khademi and Warwick P. Bowen},
  year = {2025},
  url = {https://arxiv.org/abs/2408.00219},
  note = {Source identifier: 2408.00219}
}