TY  - RPRT
TI  - Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator
AU  - Amy Navarathna
AU  - Benjamin J. Carey
AU  - James S. Bennett
AU  - Soroush Khademi
AU  - Warwick P. Bowen
PY  - 2025
UR  - https://arxiv.org/abs/2408.00219
ID  - 2408.00219
ER  -