@misc{indiciae24cc222dedf4,
  title = {Fabrication and characterization of low-loss Al/Si/Al parallel plate capacitors for superconducting quantum information applications},
  author = {Anthony McFadden and Aranya Goswami and Tongyu Zhao and Teun van Schijndel and Trevyn F. Q. Larson and Sudhir Sahu and Stephen Gill and Florent Lecocq and Raymond Simmonds and Chris Palmstrøm},
  year = {2024},
  url = {https://arxiv.org/abs/2408.01369},
  note = {Source identifier: 2408.01369}
}