TY  - RPRT
TI  - Fabrication and characterization of low-loss Al/Si/Al parallel plate capacitors for superconducting quantum information applications
AU  - Anthony McFadden
AU  - Aranya Goswami
AU  - Tongyu Zhao
AU  - Teun van Schijndel
AU  - Trevyn F. Q. Larson
AU  - Sudhir Sahu
AU  - Stephen Gill
AU  - Florent Lecocq
AU  - Raymond Simmonds
AU  - Chris Palmstrøm
PY  - 2024
UR  - https://arxiv.org/abs/2408.01369
ID  - 2408.01369
ER  -