@misc{indiciae4a6804906570,
  title = {In situ etching of \textbackslash{}b\{eta\}-Ga2O3 using tert-butyl chloride in an MOCVD system},
  author = {Cameron A. Gorsak and Henry J. Bowman and Katie R. Gann and Joshua T. Buontempo and Kathleen T. Smith and Pushpanshu Tripathi and Jacob Steele and Debdeep Jena and Darrell G. Schlom and Huili Grace Xing and Michael O. Thompson and Hari P. Nair},
  year = {2024},
  url = {https://arxiv.org/abs/2408.01574},
  note = {Source identifier: 2408.01574}
}