@misc{indiciae86e315c6f532,
  title = {Enhanced Superconducting Qubit Performance Through Ammonium Fluoride Etch},
  author = {Cameron J. Kopas and Dominic P. Goronzy and Thang Pham and Carlos G. Torres Castanedo and Matthew Cheng and Rory Cochrane and Patrick Nast and Ella Lachman and Nikolay Z. Zhelev and Andre Vallieres and Akshay A. Murthy and Jin-su Oh and Lin Zhou and Matthew J. Kramer and Hilal Cansizoglu and Michael J. Bedzyk and Vinayak P. Dravid and Alexander Romanenko and Anna Grassellino and Josh Y. Mutus and Mark C. Hersam and Kameshwar Yadavalli},
  year = {2024},
  doi = {10.1088/2633-4356/ad88cc},
  url = {https://arxiv.org/abs/2408.02863},
  note = {Source identifier: 2408.02863}
}