@misc{indiciaea858eca6059e,
  title = {Lift-off free catalyst for metal assisted chemical etching of silicon in vapour phase},
  author = {Hanna Ohlin and Bryan Benz and Lucia Romano and Ulrich Vogt},
  year = {2024},
  url = {https://arxiv.org/abs/2408.03702},
  note = {Source identifier: 2408.03702}
}