TY  - RPRT
TI  - Lift-off free catalyst for metal assisted chemical etching of silicon in vapour phase
AU  - Hanna Ohlin
AU  - Bryan Benz
AU  - Lucia Romano
AU  - Ulrich Vogt
PY  - 2024
UR  - https://arxiv.org/abs/2408.03702
ID  - 2408.03702
ER  -