@misc{indiciae4a5ceb1d826b,
  title = {CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 mm Si Wafer},
  author = {Zihao Yang and Xiucheng Wei and Pinku Roy and Di Zhang and Ping Lu and Samyak Dhole and Haiyan Wang and Nicholas Cucciniello and Nag Patibandla and Zhebo Chen and Hao Zeng and Quanxi Jia and Mingwei Zhu},
  year = {2024},
  doi = {10.3390/ma16237468},
  url = {https://arxiv.org/abs/2408.05621},
  note = {Source identifier: 2408.05621}
}