@misc{indiciae0bea7e017b3a,
  title = {In-situ Patterned Damage-Free Etching of 3-Dimensional Structures in \textbackslash{}b\{eta\}-Ga2O3 using Triethylgallium},
  author = {Nabasindhu Das and Fikadu Alema and William Brand and Abishek Katta and Advait Gilankar and Andrei Osinsky and Nidhin Kurian Kalarickal},
  year = {2024},
  url = {https://arxiv.org/abs/2408.05824},
  note = {Source identifier: 2408.05824}
}