TY  - RPRT
TI  - In-situ Patterned Damage-Free Etching of 3-Dimensional Structures in \b{eta}-Ga2O3 using Triethylgallium
AU  - Nabasindhu Das
AU  - Fikadu Alema
AU  - William Brand
AU  - Abishek Katta
AU  - Advait Gilankar
AU  - Andrei Osinsky
AU  - Nidhin Kurian Kalarickal
PY  - 2024
UR  - https://arxiv.org/abs/2408.05824
ID  - 2408.05824
ER  -