@misc{indiciae1cc54fa76922,
  title = {Role of the Casimir force in micro- and nanoelectromechanical pressure sensors},
  author = {G. L. Klimchitskaya and A. S. Korotkov and V. V. Loboda and V. M. Mostepanenko},
  year = {2024},
  doi = {10.1209/0295-5075/ad4fbb},
  url = {https://arxiv.org/abs/2408.06058},
  note = {Source identifier: 2408.06058}
}