TY  - RPRT
TI  - Role of the Casimir force in micro- and nanoelectromechanical pressure sensors
AU  - G. L. Klimchitskaya
AU  - A. S. Korotkov
AU  - V. V. Loboda
AU  - V. M. Mostepanenko
PY  - 2024
DO  - 10.1209/0295-5075/ad4fbb
UR  - https://arxiv.org/abs/2408.06058
ID  - 2408.06058
ER  -