@misc{indiciaec49decf1bc42,
  title = {Tunable Doping and Mobility Enhancement in 2D Channel Field-Effect Transistors via Damage-Free Atomic Layer Deposition of AlOX Dielectrics},
  author = {Ardeshir Esteki and Sarah Riazimehr and Agata Piacentini and Harm Knoops and Bart Macco and Martin Otto and Gordon Rinke and Zhenxing Wang and Ke Ran and Joachim Mayer and Annika Grundmann and Holger Kalisch and Michael Heuken and Andrei Vescan and Daniel Neumaier and Alwin Daus and Max C. Lemme},
  year = {2024},
  url = {https://arxiv.org/abs/2408.07183},
  note = {Source identifier: 2408.07183}
}