@misc{indiciae3cd0c4bf359a,
  title = {A Benchmark Time Series Dataset for Semiconductor Fabrication Manufacturing Constructed using Component-based Discrete-Event Simulation Models},
  author = {Vamsi Krishna Pendyala and Hessam S. Sarjoughian and Bala Potineni and Edward J. Yellig},
  year = {2024},
  url = {https://arxiv.org/abs/2408.09307},
  note = {Source identifier: 2408.09307}
}