TY  - RPRT
TI  - A Benchmark Time Series Dataset for Semiconductor Fabrication Manufacturing Constructed using Component-based Discrete-Event Simulation Models
AU  - Vamsi Krishna Pendyala
AU  - Hessam S. Sarjoughian
AU  - Bala Potineni
AU  - Edward J. Yellig
PY  - 2024
UR  - https://arxiv.org/abs/2408.09307
ID  - 2408.09307
ER  -