@misc{indiciae6fcef9be8fbd,
  title = {Sputtered Aluminum Nitride Waveguides for the Telecommunication Spectrum with less than 0.16 dB/cm Loss},
  author = {Radhakant Singh and Mohit Raghuwanshi and Balasubramanian Sundarapandian and Rijil Thomas and Lutz Kirste and Stephan Suckow and Max Lemme},
  year = {2024},
  doi = {10.1364/oe.538852},
  url = {https://arxiv.org/abs/2408.09864},
  note = {Source identifier: 2408.09864}
}