TY  - RPRT
TI  - Sputtered Aluminum Nitride Waveguides for the Telecommunication Spectrum with less than 0.16 dB/cm Loss
AU  - Radhakant Singh
AU  - Mohit Raghuwanshi
AU  - Balasubramanian Sundarapandian
AU  - Rijil Thomas
AU  - Lutz Kirste
AU  - Stephan Suckow
AU  - Max Lemme
PY  - 2024
DO  - 10.1364/oe.538852
UR  - https://arxiv.org/abs/2408.09864
ID  - 2408.09864
ER  -