@misc{indiciae72e214a68496,
  title = {Angstrom-scale ion-beam engineering of ultrathin buried oxides for quantum and neuro-inspired computing},
  author = {N. Smirnov and E. Krivko and D. Moskaleva and D. Moskalev and A. Solovieva and V. Echeistov and E. Zikiy and N. Korshakov and A. Ivanov and E. Malevannaya and A. Matanin and V. Polozov and M. Teleganov and N. Zhitkov and R. Romashkin and I. Korobenko and A. Yanilkin and A. Lebedev and I. Ryzhikov and A. Andriyash and I. Rodionov},
  year = {2024},
  url = {https://arxiv.org/abs/2408.10138},
  note = {Source identifier: 2408.10138}
}