@misc{indiciae3b24cad0ed45,
  title = {High quality epitaxial piezoelectric and ferroelectric wurtzite Al\$\_\{1-x\}\$Sc\$\_x\$N thin films},
  author = {Yang Zeng and Yihan Lei and Yanghe Wang and Mingqiang Cheng and Luocheng Liao and Xuyang Wang and Jinxin Ge and Zhenghao Liu and Wenjie Ming and Chao Li and Shuhong Xie and Jiangyu Li and Changjian Li},
  year = {2024},
  url = {https://arxiv.org/abs/2408.11379},
  note = {Source identifier: 2408.11379}
}