@misc{indiciae05109177e5c3,
  title = {Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective Ion Acceleration using Synchronized Floating Potential HiPIMS},
  author = {Jyotish Patidar and Oleksandr Pshyk and Lars Sommerhäuser and Sebastian Siol},
  year = {2024},
  url = {https://arxiv.org/abs/2408.12174},
  note = {Source identifier: 2408.12174}
}