TY  - RPRT
TI  - Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective Ion Acceleration using Synchronized Floating Potential HiPIMS
AU  - Jyotish Patidar
AU  - Oleksandr Pshyk
AU  - Lars Sommerhäuser
AU  - Sebastian Siol
PY  - 2024
UR  - https://arxiv.org/abs/2408.12174
ID  - 2408.12174
ER  -