@misc{indiciae373cd0151de9,
  title = {Intelligent OPC Engineer Assistant for Semiconductor Manufacturing},
  author = {Guojin Chen and Haoyu Yang and Bei Yu and Haoxing Ren},
  year = {2024},
  url = {https://arxiv.org/abs/2408.12775},
  note = {Source identifier: 2408.12775}
}