TY  - RPRT
TI  - Intelligent OPC Engineer Assistant for Semiconductor Manufacturing
AU  - Guojin Chen
AU  - Haoyu Yang
AU  - Bei Yu
AU  - Haoxing Ren
PY  - 2024
UR  - https://arxiv.org/abs/2408.12775
ID  - 2408.12775
ER  -