@misc{indiciae895e3780b101,
  title = {High fidelity TiN processing modes for multi-gate Ge-based quantum devices},
  author = {Sinan Bugu and Sheshank Biradar and Alan Blake and CheWee Liu and Maksym Myronovd and Ray Duffy and Giorgos Fagas and Nikolay Petkov},
  year = {2024},
  doi = {10.1021/acsaelm.4c01499},
  url = {https://arxiv.org/abs/2408.14966},
  note = {Source identifier: 2408.14966}
}