@misc{indiciae3ef1f70faaa2,
  title = {The role of sputtered atom and ion energy distribution in films deposited by Physical Vapor Deposition: A molecular dynamics approach},
  author = {Soumya Atmane and Maroussiak Alexandre and Amaël Caillard and Anne-Lise Thomann and Movaffaq Kateb and Jón Tómas Gudmundsson and Pascal Brault},
  year = {2024},
  url = {https://arxiv.org/abs/2409.01049},
  note = {Source identifier: 2409.01049}
}