TY  - RPRT
TI  - The role of sputtered atom and ion energy distribution in films deposited by Physical Vapor Deposition: A molecular dynamics approach
AU  - Soumya Atmane
AU  - Maroussiak Alexandre
AU  - Amaël Caillard
AU  - Anne-Lise Thomann
AU  - Movaffaq Kateb
AU  - Jón Tómas Gudmundsson
AU  - Pascal Brault
PY  - 2024
UR  - https://arxiv.org/abs/2409.01049
ID  - 2409.01049
ER  -