@misc{indiciae9137126d77c7,
  title = {Advancing SEM Based Nano-Scale Defect Analysis in Semiconductor Manufacturing for Advanced IC Nodes},
  author = {Bappaditya Dey and Matthias Monden and Victor Blanco and Sandip Halder and Stefan De Gendt},
  year = {2024},
  url = {https://arxiv.org/abs/2409.04310},
  note = {Source identifier: 2409.04310}
}