@misc{indiciaebb76c89859a0,
  title = {Tantalum thin films sputtered on silicon and on different seed layers: material characterization and coplanar waveguide resonator performance},
  author = {Moritz Singer and Benedikt Schoof and Harsh Gupta and Daniela Zahn and Johannes Weber and Marc Tornow},
  year = {2024},
  doi = {10.1109/qce60285.2024.00141},
  url = {https://arxiv.org/abs/2409.06041},
  note = {Source identifier: 2409.06041}
}