TY  - RPRT
TI  - Tantalum thin films sputtered on silicon and on different seed layers: material characterization and coplanar waveguide resonator performance
AU  - Moritz Singer
AU  - Benedikt Schoof
AU  - Harsh Gupta
AU  - Daniela Zahn
AU  - Johannes Weber
AU  - Marc Tornow
PY  - 2024
DO  - 10.1109/qce60285.2024.00141
UR  - https://arxiv.org/abs/2409.06041
ID  - 2409.06041
ER  -