@misc{indiciae85744d6af737,
  title = {Scanning Electron Microscopy-based Automatic Defect Inspection for Semiconductor Manufacturing: A Systematic Review},
  author = {Enrique Dehaerne and Bappaditya Dey and Victor Blanco and Jesse Davis},
  year = {2025},
  doi = {10.1117/1.jmm.24.2.020901},
  url = {https://arxiv.org/abs/2409.06833},
  note = {Source identifier: 2409.06833}
}