@misc{indiciae4ca08919a41f, title = {Quantifying Implantation Induced Damage and Point Defects with Multislice Electron Ptychography}, author = {Junghwa Kim and Colin Gilgenbach and Aaditya Bhat and James LeBeau}, year = {2025}, url = {https://arxiv.org/abs/2409.06987}, note = {Source identifier: 2409.06987} }