TY - RPRT TI - Quantifying Implantation Induced Damage and Point Defects with Multislice Electron Ptychography AU - Junghwa Kim AU - Colin Gilgenbach AU - Aaditya Bhat AU - James LeBeau PY - 2025 UR - https://arxiv.org/abs/2409.06987 ID - 2409.06987 ER -