@misc{indiciae16990ebbdbc2,
  title = {Development of ion-beam sputtered silicon nitride thin films for low-noise mirror coatings of gravitational-wave detectors},
  author = {A. Amato and M. Bazzan and G. Cagnoli and M. Canepa and M. Coulon and J. Degallaix and N. Demos and A. Di Michele and M. Evans and F. Fabrizi and G. Favaro and D. Forest and S. Gras and D. Hofman and A. Lemaitre and G. Maggioni and M. Magnozzi and V. Martinez and L. Mereni and C. Michel and V. Milotti and M. Montani and A. Paolone and A. Pereira and F. Piergiovanni and V. Pierro and L. Pinard and I. M. Pinto and E. Placidi and S. Samandari and B. Sassolas and N. Shcheblanov and J. Teillon and I. Vickridge and M. Granata},
  year = {2025},
  doi = {10.1103/physrevd.111.042003},
  url = {https://arxiv.org/abs/2409.07147},
  note = {Source identifier: 2409.07147}
}