@misc{indiciaefecd8903d470,
  title = {Development of TiN/AlN-based superconducting qubit components},
  author = {Benedikt Schoof and Moritz Singer and Simon Lang and Harsh Gupta and Daniela Zahn and Johannes Weber and Marc Tornow},
  year = {2024},
  doi = {10.1109/qce60285.2024.00145},
  url = {https://arxiv.org/abs/2409.07227},
  note = {Source identifier: 2409.07227}
}