TY  - RPRT
TI  - Development of TiN/AlN-based superconducting qubit components
AU  - Benedikt Schoof
AU  - Moritz Singer
AU  - Simon Lang
AU  - Harsh Gupta
AU  - Daniela Zahn
AU  - Johannes Weber
AU  - Marc Tornow
PY  - 2024
DO  - 10.1109/qce60285.2024.00145
UR  - https://arxiv.org/abs/2409.07227
ID  - 2409.07227
ER  -