@misc{indiciaea4078d202f0f,
  title = {Cryogenic microwave performance of silicon nitride and amorphous silicon deposited using low-temperature ICPCVD},
  author = {Jiamin Sun and Shibo Shu and Ye Chai and Lin Zhu and Lingmei Zhang and Yongping Li and Zhouhui Liu and Zhengwei Li and Yu Xu and Daikang Yan and Weijie Guo and Yiwen Wang and Congzhan Liu},
  year = {2024},
  url = {https://arxiv.org/abs/2409.09301},
  note = {Source identifier: 2409.09301}
}