@misc{indiciaea27dbd50efd3, title = {Quantum Kernel Learning for Small Dataset Modeling in Semiconductor Fabrication: Application to Ohmic Contact}, author = {Zeheng Wang and Fangzhou Wang and Liang Li and Zirui Wang and Timothy van der Laan and Ross C. C. Leon and Jing-Kai Huang and Muhammad Usman}, year = {2025}, doi = {10.1002/advs.202506213}, url = {https://arxiv.org/abs/2409.10803}, note = {Source identifier: 2409.10803} }