TY - RPRT TI - Quantum Kernel Learning for Small Dataset Modeling in Semiconductor Fabrication: Application to Ohmic Contact AU - Zeheng Wang AU - Fangzhou Wang AU - Liang Li AU - Zirui Wang AU - Timothy van der Laan AU - Ross C. C. Leon AU - Jing-Kai Huang AU - Muhammad Usman PY - 2025 DO - 10.1002/advs.202506213 UR - https://arxiv.org/abs/2409.10803 ID - 2409.10803 ER -