@misc{indiciae809f87af0472,
  title = {Data-driven surrogate model for etch rate profiles using sensor data from a reactive ion etcher},
  author = {Abhijit Pranav Pamarty and Robert Neuweiler and Le Quyen Do and Keaton Johnson and James J. Sanchez and Dinesh Koli},
  year = {2024},
  url = {https://arxiv.org/abs/2409.12925},
  note = {Source identifier: 2409.12925}
}