@misc{indiciae819950c8d48a,
  title = {Open-Source Differentiable Lithography Imaging Framework},
  author = {Guojin Chen and Hao Geng and Bei Yu and David Z. Pan},
  year = {2024},
  url = {https://arxiv.org/abs/2409.15306},
  note = {Source identifier: 2409.15306}
}