@misc{indiciae4d0e6c8a7816,
  title = {Effect of Etching Methods on Dielectric Losses in Transmons},
  author = {T. A. Chudakova and G. S. Mazhorin and I. V. Trofimov and N. Yu. Rudenko and A. M. Mumlyakov and A. S. Kazmina and E. Yu. Egorova and P. A. Gladilovich and M. V. Chichkov and N. A. Maleeva and M. A. Tarkhov and V. I. Chichkov},
  year = {2024},
  doi = {10.1134/s0021364024602410},
  url = {https://arxiv.org/abs/2409.16097},
  note = {Source identifier: 2409.16097}
}