@misc{indiciae6b9937d1450a,
  title = {NiOx/\textbackslash{}b\{eta\}-Ga2O3 Heterojunction Diode Achieving Breakdown Voltage >3 kV with Plasma Etch Field-Termination},
  author = {Yizheng Liu and Saurav Roy and Carl Peterson and Arkka Bhattacharyya and Sriram Krishnamoorthy},
  year = {2024},
  url = {https://arxiv.org/abs/2409.17374},
  note = {Source identifier: 2409.17374}
}